"Tunable Dielectric and Thermal Properties of Oxide Dielectrics via Substrate Biasing in Plasma-Enhanced Atomic Layer Deposition"
Kim, Yoonjin,
Kwon, Heungdong, Han, Hyun Soo, Kim, Hyo Jin K., Kim, Brian S. Y., Lee, Byung Chul, Lee, Joohyun, Asheghi, Mehdi, Prinz, Fritz B., Goodson, Kenneth E., Lim, Jongwoo, Sim, Uk, Park, Woosung,
ACS Applied Materials & Interfaces,
12(40),
44912-44918